PVD Thin Film Deposition System Sputtering And Thermal Evaporating Vacuum Coating High productivity PVD Coating Machine

PVD Thin Film Deposition System Sputtering And Thermal Evaporating Vacuum Coating Equipment

PVD Thin Film Deposition System, Sputtering and Thermal Evaporating Vacuum Coating Equipment

PVD Thin Film Deposition System contains the deposition sources of Tungsten filament evaporation source and DC magnetron sputter sources (RF sputtering cathodes are for option). This equipment is mostly used to deposit thin films on plastic parts, glass, metal or foils with the depositing materials like: pure metal Al, Cr, Cu, Ag, Au, Ti etc. Evaporation sources generally to obtain high reflective thin films on products surfaces or conductive films, or give a metallic outlook image. Except that, the sputtering sources condense a wide range of semiconductor materials and dielectrics including transparent conductive oxides, etc.

PVD Thin Film Deposition System Configurations:

Performance

1. Ultimate Vacuum Pressure: better than 5.0×10^-6 Torr.

2. Operating Vacuum Pressure: 1.0×10^-4 Torr.

3. Pumping down Time from 1 atm to 1.0×10^-4 Torr≤3 minutes ( room temperature, dry, clean and empty chamber)

4. Metalizing material ( evaporation): Al, Cr, Sn, Ti, SS, Cu… etc.

5. Operating Model: Full Automatically /Semi-Auto/ Manually

lStructure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber
1.1 Size: Inner Diameter 1600mm

Inner Height 1600mm

1.2 Material: Vacuum Chamber SUS304 (SS41 mild steel for option)

Door and flanges SUS304 (SS41 mild steel for option)

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Shield: SUS304

1.4 View Window: on chamber door

1.5 Vacuum Chamber Venting Valve, including silencer

1.6 Door SUS304 material

2. Rouhging Vacuum Pumping System

3. High Vacuum Pumping System

4. Electrical Control and Operation System- PLC+ Touch Screen

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Evaporation Power: 35kVA

4.3 Evaporation Control System

4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5 Vacuum Pressure Measuring System

Vacuum Gauge: Pirani + Penning gauge

Thermocouple Gauge: 760 Torr ~ 5*10^-4 Torr

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

5. Deposition System

5.1 Tungsten filament evaporation source

5.2 Thermal evaporation materials: wires, rings, rods etc.

5.3 Sputter sources (DC/MF power driven)

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System-Water flow pipe and switch valve system

Learn more about the machine and applications available, please contact us now.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.